Microelectromechanical Systems (MEMS) have captured the interest of the public with their promise to miniaturize existing systems.  Although much of the excitement surrounding MEMS has died down, real applications are beginning to emerge.  MEMS accelerometers for games, automotive, and wireless applications have emerged.  MEMS inkjet chips are now ubiquitous, and new applications for RF and sensors are in development.  One of the most challenging aspects of MEMS is packaging.  Forces that normally do not affect meso-scale objects must be understood and controlled at the micro-scale.  This has created a number of challenges related to the packaging of these components. MEMS Technology is an online course that offers detailed instruction on the design, processing, packaging, and reliability of MEMS devices. We also cover Deep Reactive Ion Etching (DRIE), surface-to-volume ratio issues, electrostatics, liquid wetting, inertia, and other parameters  

MEMS Technology Online Course

Microelectromechanical Systems (MEMS) have captured the interest of the public with their promise to miniaturize existing systems.  Although much of the excitement surrounding MEMS has died down, real applications are beginning to emerge.  MEMS accelerometers for games, automotive, and wireless applications have emerged.  MEMS inkjet chips are now ubiquitous, and new applications for RF and sensors are in development.  One of the most challenging aspects of MEMS is packaging.  Forces that normally do not affect meso-scale objects must be understood and controlled at the micro-scale.  This has created a number of challenges related to the packaging of these components. MEMS Technology is an online course that offers detailed instruction on the design, processing, packaging, and reliability of MEMS devices. We also cover Deep Reactive Ion Etching (DRIE), surface-to-volume ratio issues, electrostatics, liquid wetting, inertia, and other parameters.